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Improvement in the mechanical performance of Czochralski silicon under indentation by germanium doping
Zhidan Zeng;  Lin Wang;  Xiangyang Ma;  Shaoxing Qu;   Jiahe Chen;  Yonggang Liu;  Deren Yang
2011
Source PublicationScripta Materialia
Volume64Issue:9Pages:832–835
Abstract

The mechanical properties of germanium-doped Czochralski (GCz) silicon have been investigated using instrumented nanoindentation combined with an ultrasonic pulse-echo overlap technique. The GCz silicon samples showed higher Young’s modulus and hardness than germanium-free Czochralski silicon samples in nanoindentation tests. We believe this was caused by the enhanced phase transition from the Si-I phase to the stiffer Si-II phase in GCz silicon under contact load during indentation. This scenario was further confirmed by micro-Raman spectroscopy measurements.

KeywordSilicon Nanoindentation Phase Transformation Raman Spectroscopy Germanium Doping
Indexed BySCI
Language英语
Document Type期刊论文
Identifierhttp://ir.gyig.ac.cn/handle/42920512-1/9498
Collection地球内部物质高温高压实验室
Affiliation1.State Key Laboratory of Silicon Materials and Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, People’s Republic of China
2.High Pressure Synergetic Consortium (HPSynC), Geophysical Laboratory, Carnegie Institution of Washington, Argonne, IL 60439, USA
3.State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, People’s Republic of China
4.Institute of Applied Mechanics,School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310027, People’s Republic of China
5.Institute of Geochemistry, Chinese Academy of Sciences, Guiyang 550002, People’s Republic of China
Recommended Citation
GB/T 7714
Zhidan Zeng;Lin Wang;Xiangyang Ma;Shaoxing Qu; Jiahe Chen;Yonggang Liu;Deren Yang. Improvement in the mechanical performance of Czochralski silicon under indentation by germanium doping[J]. Scripta Materialia,2011,64(9):832–835.
APA Zhidan Zeng;Lin Wang;Xiangyang Ma;Shaoxing Qu; Jiahe Chen;Yonggang Liu;Deren Yang.(2011).Improvement in the mechanical performance of Czochralski silicon under indentation by germanium doping.Scripta Materialia,64(9),832–835.
MLA Zhidan Zeng;Lin Wang;Xiangyang Ma;Shaoxing Qu; Jiahe Chen;Yonggang Liu;Deren Yang."Improvement in the mechanical performance of Czochralski silicon under indentation by germanium doping".Scripta Materialia 64.9(2011):832–835.
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